Recently, YUWEITEK's first i6R-210 mask panoramic quality management product was successfully shipped and successfully delivered to the domestic advanced mask plate manufacturer. The i6R-210 shipped this time is the first mask panoramic quality management equipment that combines defect detection, double-sided cleaning and reversion functions.

As the third generation of i6R product line, I6R-210 products inherit the characteristics of the previous two generations of products, such as high yield, high-precision light and dark field detection system and easy operation. Through the introduction of a number of advanced technologies and function optimization, the application scenario has been successfully extended from the previous yellow light area of the wafer fab to the mask room, and expanded to the mask plate production plant. At the same time, with YUWEITEK's original 360° lighting technology, i6R-210 products have gradually begun to establish a unified closed-loop management system for mask factory shipment inspection and wafer factory warehouse inspection.

In the fab, YUWEITEK i6R-210 products can be applied in the yellow light area for mask quality control before and after exposure. Compared with traditional mask surface particle detection methods, i6R-210 products can detect more comprehensive and reliable defect types to help customers avoid missing detection of certain special defect contaminants, resulting in large quantities of wafers scrapped. At the same time, in the mask room, the i6R-210 product can be applied to the factory inspection and periodic defect monitoring of the mask plate, which is convenient for customers to manage the mask plate.

In the maskshop, in order to meet the needs of customers for eye inspection replacement and shipment automation, the i6R-210 added automatic reverse plate, mask plate double-sided cleaning and other functions, as far as possible to avoid the secondary pollution caused by manual intervention, reduce the frequency of customer cleaning mask plate, and successfully achieve the goal of full coverage of all areas outside the graphic area.

i6R-210 product is an important part of Yuwei's mask life cycle quality control product line, and will cooperate with Yuwei mask inspection series products to form a one-stop mask process control comprehensive solution.

In the future, YUWEITEK will continue to increase research and development investment, in-depth analysis of customer pain points and needs, and constantly develop new products to meet customer needs, to create more value for customers with high-quality products and comprehensive services, and help the healthy development of domestic integrated circuit industry.